An optical in-plane displacement measurement technique with sub-nanometer accuracy based on curve-fitting
Conference Paper
(2014)
Author(s)
J Kokorian (TU Delft - Micro and Nano Engineering)
F. Buja (TU Delft - Micro and Nano Engineering)
U STAUFER (TU Delft - Micro and Nano Engineering)
WM van Spengen (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1109/MEMSYS.2014.6765707
To reference this document use:
https://resolver.tudelft.nl/uuid:da5d6a99-a7bd-4762-9a24-b2d196439a83
More Info
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Publication Year
2014
Language
English
Research Group
Micro and Nano Engineering
Bibliographical Note
harvest@en
Pages (from-to)
580-583
ISBN (print)
978-1-4799-3508-6
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