An optical in-plane displacement measurement technique with sub-nanometer accuracy based on curve-fitting

Conference paper (2014)

Authors

J. Kokorian Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

F. Buja Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

W.M. van Spengen Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

Research Group

Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:da5d6a99-a7bd-4762-9a24-b2d196439a83

Published Date

2014

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering