Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing
Conference Paper
(2015)
Author(s)
W.F. Quiros Solano (TU Delft - Electronic Components, Technology and Materials)
Gregory Pandraud (TU Delft - Electronic Components, Technology and Materials)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICSENS.2015.7370690
To reference this document use:
https://resolver.tudelft.nl/uuid:dc7587c8-e2c5-44c8-9709-86c7d07b9235
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Publication Year
2015
Language
English
Related content
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
harvest@en
Pages (from-to)
1-4
ISBN (print)
978-1-4799-8202-8
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