Quartz to silicon fusion bonding or micro acoustic wave applications
Conference Paper
(2000)
Author(s)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
A Berthold (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:e0010194-e6b5-4b4e-9d04-2e317eb5ca7e
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
213-216
ISBN (print)
0-7923-5010-3
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