Nanomanufacturing and scattering study of Silicon metasurfaces
Irina Malysheva (TU Delft - Mechanical Engineering, SRON–Netherlands Institute for Space Research)
Martijn Veen (TU Delft - Mechanical Engineering, TU Delft - Electrical Engineering, Mathematics and Computer Science, SRON–Netherlands Institute for Space Research)
Fabian Maucher (TU Delft - Mechanical Engineering)
Nandini Bhattacharya (TU Delft - ImPhys/Medical Imaging, TU Delft - Mechanical Engineering)
Ralf Kohlhaas (TU Delft - Mechanical Engineering, SRON–Netherlands Institute for Space Research)
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Abstract
We study straylight of metalenses both by systematically adding controlled manufacturing errors as well as numerically. For the experimental realisation, we nanofabricate amorphous silicon (a-Si) nanopillars on a silicon nitride (SiN) membrane via electron beam lithography. For the numerical comparison employ a Finite-Difference in Time-Domain solver.