Film height in soft elastohydrodynamic lubrication
with application to roll-to-plate nanoimprinting
J. Snieder (TU Delft - Mechatronic Systems Design)
R.A.J. van Ostayen – Promotor (TU Delft - Mechatronic Systems Design)
J.L. Herder – Promotor (TU Delft - Mechatronic Systems Design)
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Abstract
This dissertation presents theory and methods to predict, measure, and steer the film height in soft elastohydrodynamic lubrication. It specifically focuses on the application of roll-to-plate nanoimprinting, addressing the challenges of current roller-based imprint systems to achieve uniform film heights on large-area, non-flat substrates. The research is structured in three parts, which directly correspond to the goals of film height prediction, film height measurement, and film height steering. In the first part, numerical models are developed and experimentally validated to describe the soft elastohydrodynamic lubrication in roll-to-plate nanoimprinting. The second part presents a refined analytical model and the experimental validation of the ratiometric fluorescence film height measurement method. Lastly, the third part proposes a novel concept to steer the film height in soft elastohydrodynamic lubrication, inspired by inverse lubrication theory. Overall, the developed theory and methods on film height prediction, measurement, and steering form a solid basis for future research and facilitate practical implementation to further improve the film height uniformity in soft elastohydrodynamic lubrication processes.