A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices
Conference Paper
(2007)
Author(s)
T Alan (TU Delft - Old - EWI Sect. ECTM)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:e21779fe-8edb-4732-b5d4-fd13a02f0655
More Info
expand_more
expand_more
Publication Year
2007
Research Group
Old - EWI Sect. ECTM
Bibliographical Note
NEO@en
Pages (from-to)
1-5
ISBN (print)
978-1-55899-990-9
No files available
Metadata only record. There are no files for this record.