A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices

Conference paper (2007)

Authors

T Alan Old - EWI Sect. ECTM
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2007

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM