Energy transport in plasma etching of nanoporous dielectric materials
Journal Article
(2004)
Author(s)
JL Plawsky (TU Delft - Old organisation DCT/Reactor & Catalysis Engin.)
S Ponoth (External organisation)
G Dalakos (External organisation)
K Malek (TU Delft - Old organisation ChemE/Phys.Chem. & Mol.Thermod.)
MO Coppens (TU Delft - Old organisation ChemE/Phys.Chem. & Mol.Thermod.)
Research Group
Old organisation DCT/Reactor & Catalysis Engin.
To reference this document use:
https://resolver.tudelft.nl/uuid:e27d58eb-7c2b-4167-8d7a-6292fe8f2540
More Info
expand_more
expand_more
Publication Year
2004
Research Group
Old organisation DCT/Reactor & Catalysis Engin.
Issue number
3-6
Volume number
35
Pages (from-to)
195-204
No files available
Metadata only record. There are no files for this record.