Energy transport in plasma etching of nanoporous dielectric materials

Journal article (2004)

Authors

JL Plawsky Old organisation DCT/Reactor & Catalysis Engin.
S Ponoth External organisation
G Dalakos External organisation
K Malek Old organisation ChemE/Phys.Chem. & Mol.Thermod.
MO Coppens Old organisation ChemE/Phys.Chem. & Mol.Thermod.
Research Group
Old organisation DCT/Reactor & Catalysis Engin.
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Published Date

2004

Language

Undefined/Unknown

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Research Group

Old organisation DCT/Reactor & Catalysis Engin.