Accurate small-scale manipulation
Bram Krijnen (University of Twente)
Dannis M. Brouwer (University of Twente)
Leon Abelmann (University of Twente, Korean Institute of Science and Technology - Europe)
Just Herder (University of Twente, TU Delft - Precision and Microsystems Engineering, TU Delft - Mechatronic Systems Design)
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Abstract
A 3-DoF micro-electromechanical (MEMS) stage has been designed with an innovative integrated feedback system based on thermal sensors. The stage is integrated in the device layer of a silicon-oninsulator-wafer, which means that no assembly is required and the stage can be fabricated using only a single mask. The range of motion is over 160 μm in two directions and 325 mrad of rotation, which exceeds the range of motion of existing MEMS stages by far.