Accurate small-scale manipulation

Journal article (2015)

Authors

Bram Krijnen University of Twente
Dannis M. Brouwer University of Twente
Leon Abelmann University of Twente, Korean Institute of Science and Technology - Europe
J.L. Herder Precision and Microsystems Engineering , University of Twente, Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2015 Bram Krijnen, Koen Swinkels, Dannis M. Brouwer, Leon Abelmann, J.L. Herder
More Info
expand_more

Published Date

2015

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

A 3-DoF micro-electromechanical (MEMS) stage has been designed with an innovative integrated feedback system based on thermal sensors. The stage is integrated in the device layer of a silicon-oninsulator-wafer, which means that no assembly is required and the stage can be fabricated using only a single mask. The range of motion is over 160 μm in two directions and 325 mrad of rotation, which exceeds the range of motion of existing MEMS stages by far.