Resolution limits in Electron Beam Induced Deposition (EBID).
Conference Paper
(2000)
Author(s)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
Cornelis W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:e4cdc497-a6be-40da-9722-54b549cc313c
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Publication Year
2000
Research Group
ImPhys/Charged Particle Optics
Bibliographical Note
ISSN: 1389-5362@en
Pages (from-to)
184-185
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