Resolution limits in Electron Beam Induced Deposition (EBID).

Conference paper (2000)

Authors

N Silvis-Cividjian ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2000

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics