Ultralow-k dielectrics made by supercritical foaming of thin polymer films

Krause, B; Koops, GH; van der Vegt, NFA; Wessling, M; Wübbenhorst, M; Turnhout, Jan van

Ultralow-k dielectrics made by supercritical foaming of thin polymer films

Journal article (2002)

Authors

B Krause External organisation

GH Koops External organisation

NFA van der Vegt External organisation

M Wessling External organisation

M Wübbenhorst Old - sect Polymer Materials and Engineering (DCT/PME)

Jan van Turnhout Old - sect Polymer Materials and Engineering (DCT/PME)

Research Group

Old - sect Polymer Materials and Engineering (DCT/PME)

ZX CWTS JFIS >= 3.00

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Published Date

2002

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Research Group

Old - sect Polymer Materials and Engineering (DCT/PME)

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