Ultralow-k dielectrics made by supercritical foaming of thin polymer films

Journal article (2002)

Authors

B Krause External organisation
GH Koops External organisation
NFA van der Vegt External organisation
M Wessling External organisation
M Wübbenhorst Old - sect Polymer Materials and Engineering (DCT/PME)
J. van Turnhout Old - sect Polymer Materials and Engineering (DCT/PME)
Research Group
Old - sect Polymer Materials and Engineering (DCT/PME)
ZX CWTS JFIS >= 3.00
More Info
expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - sect Polymer Materials and Engineering (DCT/PME)