Transfer-Free Integration of Graphene on Suspended Micro-Hotplates for No2 Sensing

Abstract

In this work, we demonstrate the use of a micro-hotplate (MHP) with graphene integrated without transfer step for NO₂ sensing. The MHP can rapidly recover the device to its initial conditions by applying a brief heat pulse. Moreover, by employing a process without graphene transfer, we prevent random polymer contamination from the transfer process. The (up to 8) graphene sensors on a single MHP show a very similar response. Finally, we demonstrate that we can extract the relative humidity from the device's response immediately after the MHP is turned off in a humid environment.