Mitigating Gravity-Induced Deformation in a Monolithic Silicon Resonator Through Thin-Film Stress Engineering
A Case Study of Stress
M.J. Lourenço De Sousa (TU Delft - Electrical Engineering, Mathematics and Computer Science)
S. Vollebregt – Mentor (TU Delft - Electrical Engineering, Mathematics and Computer Science)
Aleksandar Jovic – Mentor (Flexous Mechanisms BV)
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