High- T c superconducting THz emitters fabricated by wet etching
Yuuki Shibano (University of Tsukuba)
Takanari Kashiwagi (University of Tsukuba)
Yuki Komori (University of Tsukuba)
Kazuki Sakamoto (University of Tsukuba)
Yuki Tanabe (University of Tsukuba)
Takashi Yamamoto (TU Delft - QuTech Advanced Research Centre, TU Delft - Quantum Internet Division)
Hidetoshi Minami (University of Tsukuba)
Richard A. Klemm (University of Central Florida)
Kazuo Kadowaki (University of Tsukuba)
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Abstract
We studied the etching of small crystals of the high-Tc superconductor Bi2Sr2CaCu2O8+δ (Bi2212) with various dilute compositions of hydrochloric and nitric acids. A particular mixture of those acids was chosen to simultaneously fabricate multiple rectangular stand-alone Bi2212 mesa structures from a large, doubly-cleaved and doubly metallic-coated single crystal. The radiation characteristics of these devices were found to be very similar to stand-alone devices fabricated previously using dry-etching techniques. The greatly reduced time and cost of fabrication of stand-alone Bi2212 devices using our wet-etching technique should facilitate the mass production of a large number of identical stand-alone devices from a large single-crystalline Bi2212 substrate.