High-Resolution electron-beam-induced deposition
Book Chapter
(2008)
Author(s)
P. Crozier (External organisation)
Cornelis W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:ebe8e95c-8de0-450a-8d31-67265de41ba6
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Publication Year
2008
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
399-431
ISBN (print)
978-9812700766
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