Stress in and texture of PVD deposited metal nitride films
Doctoral Thesis
(2010)
Author(s)
R Machunze (TU Delft - OLD Surface and Interface Engineering)
Contributor(s)
GCAM Janssen – Promotor
Research Group
OLD Surface and Interface Engineering
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https://resolver.tudelft.nl/uuid:ec14aba0-af64-4058-a95a-474c1986d7bd
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Publication Year
2010
Research Group
OLD Surface and Interface Engineering
ISBN (print)
978-90-8570-577-2
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