Stress in and texture of PVD deposited metal nitride films
Doctoral Thesis
(2010)
Author(s)
R Machunze (TU Delft - OLD Surface and Interface Engineering)
Contributor(s)
Guido Janssen – Promotor
Research Group
OLD Surface and Interface Engineering
To reference this document use
https://resolver.tudelft.nl/uuid:ec14aba0-af64-4058-a95a-474c1986d7bd
More Info
expand_more
expand_more
Publication Year
2010
Language
English
Defense Date
09-07-2010
Awarding Institution
Delft University of Technology
Research Group
OLD Surface and Interface Engineering
Publisher
CPI Wohrmann Print Service
ISBN (print)
978-90-8570-577-2
Downloads counter
110
No files available
Metadata only record. There are no files for this record.