Stress in and texture of PVD deposited metal nitride films
Doctoral Thesis
(2010)
Authors
R Machunze (OLD Surface and Interface Engineering)
Research Group
OLD Surface and Interface Engineering
To reference this document use:
https://resolver.tudelft.nl/ec14aba0-af64-4058-a95a-474c1986d7bd
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Publication Year
2010
Research Group
OLD Surface and Interface Engineering
ISBN (print)
978-90-8570-577-2
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