Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C
Conference Paper
(2010)
Author(s)
M Mihailovic (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:ec17d85b-93d2-4629-aa16-9f9cdd6f87f1
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
114-117
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