Precursor utilization in atomic layer deposition on nanostructured materials in fluidized bed reactors
Abstract
(2014)
Author(s)
Fabio Grillo (TU Delft - ChemE/Product and Process Engineering)
Michiel Kreutzer (TU Delft - ChemE/Product and Process Engineering)
J.R. Van Ommen (TU Delft - ChemE/Product and Process Engineering)
Research Group
ChemE/Product and Process Engineering
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Publication Year
2014
Language
English
Research Group
ChemE/Product and Process Engineering
Pages (from-to)
1-2
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