Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams

Conference Paper (2006)
Author(s)

V Rochus (TU Delft - Dynamics of Micro and Nano Systems)

Daniel J. Rixen (TU Delft - Dynamics of Micro and Nano Systems)

JC Golinval (External organisation)

Research Group
Dynamics of Micro and Nano Systems
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Publication Year
2006
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
1-4
ISBN (print)
0-9767985-9-x

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