Piezoresistive cantilever for mechanical force sensors
Conference Paper
(2005)
Author(s)
T Chu Duc (TU Delft - Electronic Components, Technology and Materials)
JF Creemer (QN/High Resolution Electron Microscopy)
PJF Swart (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:ecb4f331-0f8f-41d8-b463-cd2e3c277af2
More Info
expand_more
expand_more
Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
Editor onbekend JH/STW@en
Pages (from-to)
143-146
ISBN (print)
90-73461-50-2
No files available
Metadata only record. There are no files for this record.