Method for localizing a region of interest in a sample and micromachining the sample using a charged particle beam

Patent (2024)

Contributors

E.B. van der Wee ImPhys/Hoogenboom group - AS (inventor)
D.B. Boltje ImPhys/Hoogenboom group - AS , BN/Arjen Jakobi Lab - AS (inventor)
J.P. Hoogenboom ImPhys/Hoogenboom group - AS (inventor)
Research Group
ImPhys/Hoogenboom group (AS) (TU Delft)
More Info
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Published Date

2024

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Hoogenboom group