Trajectory displacement in a multi beam scanning electron microscope

Journal article (2021)

Authors

Jan Stopka Czech Academy of Sciences
W. Zuidema ImPhys/Microscopy Instrumentation & Techniques - AS
P. Kruit ImPhys/Microscopy Instrumentation & Techniques - AS
Research Group
ImPhys/Microscopy Instrumentation & Techniques (AS) (TU Delft)
Electron optics Coulomb interactions Trajectory displacement Multi-beam electron microscope Slice method
More Info
expand_more

Published Date

2021

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Microscopy Instrumentation & Techniques

Abstract

The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.