Photoresist coating methods for the integration of novel 3-D RF microstructures

Journal article (2004)

Authors

NP Pham Electronic Components, Technology and Materials - EEMCS
E Boellaard Electronic Components, Technology and Materials - EEMCS
JN Burghartz Old - EWI Ch. Integrated Sensing Devices
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
ZX CWTS JFIS >= 3.00
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials