Photoresist coating methods for the integration of novel 3-D RF microstructures
Journal Article
(2004)
Author(s)
NP Pham (TU Delft - Electronic Components, Technology and Materials)
E Boellaard (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:ee1e8f6b-d9b7-46be-a048-18044d416cf6
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Issue number
3
Volume number
13
Pages (from-to)
491-499
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