Electron beam induced nanometer scale deposition
Doctoral Thesis
(2002)
Author(s)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
Contributor(s)
P Kruit – Promotor
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:eed4e648-2533-45a8-901f-a95960e285ac
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Publication Year
2002
Research Group
ImPhys/Charged Particle Optics
ISBN (print)
90 407 2289 7
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