Effect of silicon nanowire etching on signal-to-noise ratio of SiNW FETs for (bio)sensor applications

T Moh (TU Delft - Electronic Components, Technology and Materials, TU Delft - OLD ChemE/Organic Materials and Interfaces)

M Nie (TU Delft - Electronic Components, Technology and Materials)

G. Pandraud (TU Delft - Electronic Components, Technology and Materials)

Louis C P M de Smet (TU Delft - OLD ChemE/Organic Materials and Interfaces)

Ernst J. R. Sudhölter (TU Delft - OLD ChemE/Organic Materials and Interfaces)

Q-A Huang (External organisation)

Lina Sarro (TU Delft - Electronic Components, Technology and Materials)