Effect of silicon nanowire etching on signal-to-noise ratio of SiNW FETs for (bio)sensor applications

Journal article (2013)

Authors

T.S.Y. Moh Electronic Components, Technology and Materials - EEMCS , OLD ChemE/Organic Materials and Interfaces
M. Nie Electronic Components, Technology and Materials - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
L.C.P.M. de Smet OLD ChemE/Organic Materials and Interfaces
Ernst J. R. Sudhölter OLD ChemE/Organic Materials and Interfaces
Q-A Huang External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2013

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials