Controlling dielectric and optical properties of ordered mesoporous organosilicate films

Journal article (2003)

Authors

R. Balkenende Philips Research
F.K. de Theije Philips Research
J. C.Koen Kriege Philips Research
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Published Date

16-01-2003

Language

English

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Abstract

The control of dielectric and optical properties of ordered mesoporous organosilicate films was discussed. The composition of the annealed organosilicate films was uniform over the layer thickness according to Rutherford Backscattering (RBS) depth profiling. The analysis showed that the dielectric properties of the layers strongly depended on the degree of hydrophobicity.