Controlling dielectric and optical properties of ordered mesoporous organosilicate films
Journal Article
(2003)
Author(s)
Ruud Balkenende (Philips Research)
Femke K. de Theije (Philips Research)
J. C.Koen Kriege (Philips Research)
Affiliation
External organisation
DOI related publication
https://doi.org/10.1002/adma.200390028
To reference this document use:
https://resolver.tudelft.nl/uuid:f254a66f-c744-496e-9d87-dd17e05215cd
More Info
expand_more
expand_more
Publication Year
2003
Language
English
Affiliation
External organisation
Issue number
2
Volume number
15
Pages (from-to)
139-143
Abstract
The control of dielectric and optical properties of ordered mesoporous organosilicate films was discussed. The composition of the annealed organosilicate films was uniform over the layer thickness according to Rutherford Backscattering (RBS) depth profiling. The analysis showed that the dielectric properties of the layers strongly depended on the degree of hydrophobicity.
No files available
Metadata only record. There are no files for this record.