On the improvement of heterodyne displacement interferometry: Enhancing measurement linearity and system modularity

Doctoral thesis (2014)

Authors

A.J.H. Meskers Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2014

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design