Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 2: Thermal property, and sensitivity
Journal Article
(2009)
Author(s)
F jutzi (External organisation)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
Gregory Pandraud (TU Delft - Electronic Components, Technology and Materials)
N de rooij (External organisation)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:f4855426-e069-449b-b5d2-59e69df9462b
More Info
expand_more
expand_more
Publication Year
2009
Research Group
Electronic Instrumentation
Volume number
152
Pages (from-to)
126-138
No files available
Metadata only record. There are no files for this record.