Electrochemical etching for n-type silicon using a novel etchant
Conference Paper
(2001)
Author(s)
S Izuo (External organisation)
H Ohji (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:f4b01576-d94f-42d3-bc8f-558f76f3d5fe
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
3-540-42150-5
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