Silver-based reflective coatings for micromachined optical filters
Journal Article
(1999)
Author(s)
M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
JHG Correia (External organisation)
Reinoud Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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https://resolver.tudelft.nl/uuid:f4bf5b35-8fc8-4bfd-b0cd-56018d1cfb91
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Publication Year
1999
Research Group
Old - EWI Ch. Integrated Sensing Devices
Volume number
9
Pages (from-to)
162-165
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