Influence of Structural Parameters on Stress/Strain Amplification property of Biomimetics Membrane-in-Recess Si Microstructure (U-SP-2-I-ICT)

Conference paper (2006)

Authors

DHB Wicaksono Electronic Instrumentation - EEMCS
L Zhang Electronic Instrumentation - EEMCS
Yue chen External organisation
P.J. French Electronic Instrumentation - EEMCS
N Gharbage Old - EWI Sect. Electronic Instrumentation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2006

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation