TiO2 ALD nanolayer as evanescent waveguide for biomedical sensor applications
Conference Paper
(2010)
Author(s)
A. Purniawan (TU Delft - Electronic Instrumentation)
Pim J. French (TU Delft - Electronic Instrumentation)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1016/j.proeng.2010.09.310
To reference this document use:
https://resolver.tudelft.nl/uuid:f5ad3be3-1d2a-4459-813b-c25bd5c907f5
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1131-1135
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