A Wireless MEMS Humidity Sensor Based on a Paper-Aluminium Bimorph Cantilever

Abstract

This contribution describes the feasibility of a wireless sensor that uses Micro-Electro-Mechanical Systems (MEMS) on cellulose materials. In particular, the focus is on a paper-aluminum (paper-Al) bimorph cantilever formed by an Al foil glued on top of a paper layer. It is well known that paper relaxes its fibers in the presence of humidity. This means that the length of the paper layer increases (respect to the Al layer) when humidity is absorbed, thus determining the cantilever deflection. Such a mechanism is used to control a capacitor formed by the cantilever itself (Al layer) and by a metal plate printed on a PCB. The capacitor is then applied to a planar notch filter whose resonant frequency is hence determined by the humidity. The preliminary experiments show that the developed circuit features a 2.45 GHz center frequency and a sensitivity of about 3.7 MHz ner each nercent of relative humidity variation.