In-Plane Thermal Unimorph Using Confined Polymers

Abstract

This paper presents a novel design of an electrothermally actuated unimorph, consisting of a metallic heater, a heat conducting structure of asymmetric shape, and thermally expandable polymer. The polymer is confined by the thermal conducting structure of large depth, in order to improve heat transfer as well as to enhance thermal expansion in a desired direction. A 500 µm long, 50 µm thick, micro-fabricated actuator of the proposed design is experimentally demonstrated with a large deflection of almost 25 µm at 1.75 V.