In-Plane Thermal Unimorph Using Confined Polymers

Conference paper (2006)

Authors

GK Lau Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
T Chu Duc Electronic Components, Technology and Materials - EEMCS
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2006

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

This paper presents a novel design of an electrothermally actuated unimorph, consisting of a metallic heater, a heat conducting structure of asymmetric shape, and thermally expandable polymer. The polymer is confined by the thermal conducting structure of large depth, in order to improve heat transfer as well as to enhance thermal expansion in a desired direction. A 500 µm long, 50 µm thick, micro-fabricated actuator of the proposed design is experimentally demonstrated with a large deflection of almost 25 µm at 1.75 V.