High-accuracy absolute distance measurement with a mode-resolved optical frequency comb

Conference Paper (2016)
Author(s)

Dirk Voigt (VSL Dutch Metrology Institute)

Steven Van Den Berg (VSL Dutch Metrology Institute)

Adam Lešundák (Institute of Scientific Instruments AS CR V.v.i)

S. van Eldik (MAPPER Lithography)

N. Bhattacharya (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
Copyright
© 2016 Dirk Voigt, Steven A. Van Den Berg, Adam Lešundák, S. van Eldik, N. Bhattacharya
DOI related publication
https://doi.org/10.1117/12.2227360
More Info
expand_more
Publication Year
2016
Language
English
Copyright
© 2016 Dirk Voigt, Steven A. Van Den Berg, Adam Lešundák, S. van Eldik, N. Bhattacharya
Research Group
ImPhys/Optics
Volume number
9899
Pages (from-to)
1-10
ISBN (electronic)
978-1-510601444
Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Abstract

Optical interferometry enables highly accurate non-contact displacement measurement. The optical phase ambiguity needs to be resolved for absolute distance ranging. In controlled laboratory conditions and for short distances it is possible to track a non-interrupted displacement from a reference position to a remote target. With large distances covered in field applications this may not be feasible, e.g. in structure monitoring, large scale industrial manufacturing or aerospace navigation and attitude control. We use an optical frequency comb source to explore absolute distance measurement by means of a combined spectral and multi-wavelength homodyne interferometry. This relaxes the absolute distance ambiguity to a few tens of centimeters, covered by simpler electronic distance meters, while maintaining highly accurate optical phase measuring capability. A virtually imaged phased array spectrometer records a spatially dispersed interferogram in a single exposure and allows for resolving the modes of our near infrared comb source with 1 GHz mode separation. This enables measurements with direct traceability of the atomic clock referenced comb source. We observed agreement within 500 nm in comparison with a commercial displacement interferometer for target distances up to 50 m. Furthermore, we report on current work toward applicability in less controlled conditions. A filter cavity decimates the comb source to an increased mode separation larger than 20 GHz. A simple grating spectrometer then allows to record mode-resolved interferograms.

Files

989906.pdf
(pdf | 0.92 Mb)
License info not available