Recent progress in technology and applications of membrane micromachined deformable mirrors
Conference Paper
(1999)
Author(s)
G Vdovin (External organisation)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
F Gonté (External organisation)
N Collings (External organisation)
R Dandliker (External organisation)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:fb9b270a-9923-43e2-863e-e0f27e007fae
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
2-11
ISBN (print)
0-8194-3246-6
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