Curvature manipulation of photomasks: Enhancing the imaging performance of immersion lithography equipment

Doctoral thesis (2013)

Authors

C.L. Valentin Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2013

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design