Infrared thermal imaging of SiNx membranes
Conference Paper
(2000)
Author(s)
A Irace (External organisation)
G Breglio (External organisation)
Marco Spirito (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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https://resolver.tudelft.nl/uuid:ff152ff6-fccb-4413-a131-a2be32c18b87
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Publication Year
2000
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
1-7
ISBN (print)
0-8194-3775-1
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