Infrared thermal imaging of SiNx membranes

Conference paper (2000)

Authors

A Irace External organisation
G Breglio External organisation
M. Spirito Old - EWI Ch. Integrated Sensing Devices
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices