A planar precision stage using a single image sensor

Master thesis (2017)

Authors

Contributors

J.W. Spronck (mentor)
Department
Precision and Microsystems Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2017 Moorsel, L. van
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Published Date

02-02-2017

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering