Thermally Driven Sound Source

Application of CNT nanofoams

Master thesis (2015)

Authors

Contributors

R.H. Poelma (mentor)
G.Q. Zhang (mentor)
H.W. Van Zeijl (mentor)
Programme
Microelectronics (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2015 Yi, H.
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Published Date

26-10-2015

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Programme

Microelectronics

Abstract

On chip grown CNT nanofoam has a large surface to volume ratio and excellent thermal electrical properties, which is suitable to be used as a thermoacoustic heater. The highly porous foam exchanges heat with surrounding air efficiently. Every processing step is specifically designed to be CMOS compatible using cleanroom microfabrication. This design is expected to be a novel, robust, efficient TA device. All the advantages allow massive, parallel production, miniaturization and integration.