Aluminum-Mediated Selective Solid-Phase Epitaxy of High-Quality Silicon Diodes

Doctoral thesis (2008)

Authors

Y. Civale

Contributors

L.K. Nanver (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science () (TU Delft)

Solar cells Silicon-on-insulator Aluminum doping Elevated contacts Low temperature crystallization Metal-induced crystallization Selective solid-phase epitaxy Silicon diodes Ultra-abrupt junctions Ultrashallow junctions

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Published Date

04-11-2008

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Faculty

Electrical Engineering, Mathematics and Computer Science

Files

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