Sub-wavelength metrology using Coherent Fourier Scatterometry

Doctoral thesis (2016)

Authors

Contributors

H.P. Urbach (promotor)
Department
ImPhys/Imaging Physics (AS) (TU Delft)
Copyright: © 2016 Roy, S.
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Published Date

21-03-2016

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Abstract

Scattering is the process in which some form of radiation is deviated from its trajectory by a localized non-uniformity it encounters. These non-uniformities, called objects, can be of different material and geometry which determines among many things, mainly, the amount and direction of the scattered radiation. Scatterometry is the branch of science where an accurate estimation of certain properties of the object can be calculated upon measuring this scattered radiation and using some a-priori information about it. In this thesis we present results on designing, developing and testing a special type of optical scatterometric setup to perform metrology of two different kinds of objects: periodic ones (which, in theory, is infinitely extended) and very small isolated ones (which, in theory, can be considered as infinitesimally small).