Stealth fiducial markers

Enhancing re-detection efficacy of defects on blank wafers

Master thesis (2015)

Authors

Contributors

P.F.A. Alkemade (mentor)
P. Van der Walle (mentor)
Programme
Applied Physics (AS) (TU Delft)
Copyright: © 2015 Bouwens, M.A.J.
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Published Date

02-11-2015

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Programme

Applied Physics

Abstract

In this thesis a stealth fiducial marker system for blank wafers is designed, fabricated and validated. The goal of this marker system it to map the coordinates of TNO’s Rapid Nano (a fast optical inspection tool) to the coordinates of scanning electron microscopes and atomic force microscopes. This way defects, that have been detected in the Rapid Nano, can be re-detected with a higher efficacy in the scanning electron microscope or atomic force microscope for further study.