Development of Capacitive Position Transducers through a Mechatronic Approach

Title

Development of Capacitive Position Transducers through a Mechatronic Approach

Author

Zhu, F.

Contributor

van Beek, H.F. (promotor)

Faculty

Mechanical Maritime and Materials Engineering

Date

1992-04-13

Subject

capacitive measurement
position transducer
tactile transducer
flexural hinge
x-y stage

To reference this document use:

http://resolver.tudelft.nl/uuid:442b9c7c-39dc-49c1-a52e-6bce6a0985e8

ISBN

90-9005114-7

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 1992 F. Zhu