Print Email Facebook Twitter High-Strength Amorphous Silicon Carbide for Nanomechanics Title High-Strength Amorphous Silicon Carbide for Nanomechanics Author Xu, M. (TU Delft Precision and Microsystems Engineering) Shin, D. (TU Delft Team Georgy Filonenko) Sberna, P.M. (TU Delft Tera-Hertz Sensing) van der Kolk, R.J.H. (TU Delft QN/Kavli Nanolab Delft) Cupertino, A. (TU Delft Dynamics of Micro and Nano Systems) Bessa, M.A. (TU Delft Team Marcel Sluiter; Brown University) Norte, R.A. (TU Delft QN/Groeblacher Lab; TU Delft Dynamics of Micro and Nano Systems) Department Precision and Microsystems Engineering Date 2023 Abstract For decades, mechanical resonators with high sensitivity have been realized using thin-film materials under high tensile loads. Although there are remarkable strides in achieving low-dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the resonator materials. In this study, a wafer-scale amorphous thin film is uncovered, which has the highest ultimate tensile strength ever measured for a nanostructured amorphous material. This silicon carbide (SiC) material exhibits an ultimate tensile strength of over 10 GPa, reaching the regime reserved for strong crystalline materials and approaching levels experimentally shown in graphene nanoribbons. Amorphous SiC strings with high aspect ratios are fabricated, with mechanical modes exceeding quality factors 108 at room temperature, the highest value achieves among SiC resonators. These performances are demonstrated faithfully after characterizing the mechanical properties of the thin film using the resonance behaviors of free-standing resonators. This robust thin-film material has significant potential for applications in nanomechanical sensors, solar cells, biological applications, space exploration, and other areas requiring strength and stability in dynamic environments. The findings of this study open up new possibilities for the use of amorphous thin-film materials in high-performance applications. Subject amorphous silicon carbidehigh mechanical quality factorultimate tensile strength To reference this document use: http://resolver.tudelft.nl/uuid:4465d47a-be01-499e-91da-a4139fecc2b5 DOI https://doi.org/10.1002/adma.202306513 ISSN 0935-9648 Source Advanced Materials, 36 (5) Part of collection Institutional Repository Document type journal article Rights © 2023 M. Xu, D. Shin, P.M. Sberna, R.J.H. van der Kolk, A. Cupertino, M.A. Bessa, R.A. Norte Files PDF Advanced_Materials_2023_X ... hanics.pdf 1.83 MB Close viewer /islandora/object/uuid:4465d47a-be01-499e-91da-a4139fecc2b5/datastream/OBJ/view