Graphene nano-electromechanical mass sensor with high resolution at room temperature

Graphene nano-electromechanical mass sensor with high resolution at room temperature

Shin, D. (TU Delft Dynamics of Micro and Nano Systems; Kavli institute of nanoscience Delft; Ewha Womans University)
Kim, Hakseong (Korea Research Institute of Standards and Science, Daejon)
Kim, S.H. (TU Delft BN/Chirlmin Joo Lab; Kavli institute of nanoscience Delft)
Cheong, Hyeonsik (Sogang University)
Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; Kavli institute of nanoscience Delft)
Joo, C. (TU Delft BN/Chirlmin Joo Lab; Kavli institute of nanoscience Delft; Ewha Womans University)
Lee, Sang Wook (Ewha Womans University)

2023

The inherent properties of 2D materials—light mass, high out-of-plane flexibility, and large surface area—promise great potential for precise and accurate nanomechanical mass sensing, but their application is often hampered by surface contamination. Here we demonstrate a tri-layer graphene nanomechanical resonant mass sensor with sub-attogram resolution at room temperature, fabricated by a bottom-up process. We found that Joule-heating is effective in cleaning the graphene membrane surface, which results in a large improvement in the stability of the resonance frequency. We characterized the sensor by depositing Cr metal using a stencil mask and found a mass-resolution that is sufficient to weigh very small particles, like large proteins and protein complexes, with potential applications in the fields of nanobiology and medicine.

Materials class
Nanomaterials
Sensor

http://resolver.tudelft.nl/uuid:52ac12b5-5083-4396-9c78-faeee33c956d

https://doi.org/10.1016/j.isci.2023.105958

2589-0042

iScience, 26 (2)

Institutional Repository

journal article

© 2023 D. Shin, Hakseong Kim, S.H. Kim, Hyeonsik Cheong, P.G. Steeneken, C. Joo, Sang Wook Lee