Single-grain Si TFTs with ECR-PECVD gate SiO/sub 2/

Journal article (2004)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 2004 Ishihara, R.; Hiroshima, Y.; Abe, D.; van Dijk, B.D.; van der Wilt, P.C.; Higashi, S.; Inoue, S.; Shimoda, T.; Metselaar, J.W.; Beenakker, C.I.M.
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Published Date

2004

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Source:

IEEE Transactions on Electron Devices, 51 (3)

Faculty

Electrical Engineering, Mathematics and Computer Science