Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Zhuang, Y.
Vroubel, M.
Rejaei, B.
Burghartz, J.N.
Attenborough, K.

Electrical Engineering, Mathematics and Computer Science

2005-05-17

A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (? ? 1.0??m). Nanonuclei (? ? 30–50?nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ? 50?mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency ( ? 5.5?GHz) with a maximum quality factor ( ? 3).

permalloy
chromium
titanium
discontinuous metallic thin films
granular materials
granular structure
magnetic thin films
nanostructured materials
magnetic anisotropy
ferromagnetic resonance
electroplating
magnetic permeability
interface magnetism
solenoids
Q-factor
radiofrequency integrated circuits
surface morphology
nanotechnology
magnetic cores
thin film inductors
thin film circuits
magnetic thin film devices
atomic force microscopy

http://resolver.tudelft.nl/uuid:80bf7695-8156-4c78-8fdf-6ef96a1aabf8

https://doi.org/10.1063/1.1857391

American Institute of Physics

0021-8979

http://link.aip.org/link/JAPIAU/v97/i10/p10N305/s1

Journal of Applied Physics, 97 (10), 2005

Institutional Repository

journal article

(c) 2005 The Author(s); American Institute of Physics