A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

Journal article (2018)

Authors

A. Jovic EKL Processing - EEMCS
G. Pandraud EKL Processing - EEMCS
Nuria Sanchez MedLumics
Juan Sancho MedLumics
Jose L. Rubio MedLumics
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Pasqualina M. Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
EKL Processing (EEMCS) (TU Delft)
Copyright: © 2018 A. Jovic, G. Pandraud, Nuria Sanchez Losilla, Juan Sancho, Kirill Zinoviev, Jose L. Rubio, E Margallo Balbas, Pasqualina M Sarro
DOI: https://doi.org/10.1109/JMEMS.2018.2802321
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Published Date

2018

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Else Kooi Laboratory

Research Group

EKL Processing

Abstract

In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm2, this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.

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