Print Email Facebook Twitter Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM Title Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM Author Skoupý, R. (TU Delft BN/Arjen Jakobi Lab; Czech Academy of Sciences; Kavli institute of nanoscience Delft) Boltje, D.B. (TU Delft ImPhys/Hoogenboom group) Slouf, Miroslav (Czech Academy of Sciences) Mrázová, Kateřina (Czech Academy of Sciences) Láznička, Tomáš (Czech Academy of Sciences) Taisne, C.M. (TU Delft BN/Arjen Jakobi Lab) Krzyžánek, Vladislav (Czech Academy of Sciences) Hoogenboom, J.P. (TU Delft ImPhys/Hoogenboom group) Jakobi, A. (TU Delft BN/Arjen Jakobi Lab) Date 2023 Abstract A quantitative four-dimensional scanning transmission electron microscopy (4D-STEM) imaging technique (q4STEM) for local thickness estimation across amorphous specimen such as obtained by focused ion beam (FIB)-milling of lamellae for (cryo-)TEM analysis is presented. This study is based on measuring spatially resolved diffraction patterns to obtain the angular distribution of electron scattering, or the ratio of integrated virtual dark and bright field STEM signals, and their quantitative evaluation using Monte Carlo simulations. The method is independent of signal intensity calibrations and only requires knowledge of the detector geometry, which is invariant for a given instrument. This study demonstrates that the method yields robust thickness estimates for sub-micrometer amorphous specimen using both direct detection and light conversion 2D-STEM detectors in a coincident FIB-SEM and a conventional SEM. Due to its facile implementation and minimal dose reauirements, it is anticipated that this method will find applications for in situ thickness monitoring during lamella fabrication of beam-sensitive materials. Subject 4D-STEMcryo-ETFIB millingTEM analysis To reference this document use: http://resolver.tudelft.nl/uuid:8e0ac213-5f21-4550-9f77-7f03ec109e4c DOI https://doi.org/10.1002/smtd.202300258 ISSN 2366-9608 Source SMALL METHODS, 7 (9) Part of collection Institutional Repository Document type journal article Rights © 2023 R. Skoupý, D.B. Boltje, Miroslav Slouf, Kateřina Mrázová, Tomáš Láznička, C.M. Taisne, Vladislav Krzyžánek, J.P. Hoogenboom, A. Jakobi Files PDF Small_Methods_2023_Skoup_ ... STEM_1.pdf 2.69 MB Close viewer /islandora/object/uuid:8e0ac213-5f21-4550-9f77-7f03ec109e4c/datastream/OBJ/view