Ion beams in SEM

An experiment towards a high brightness low energy spread electron impact gas ion source

Journal article (2011)

Authors

D.S. Jun

V.G. Kutchoukov

P. Kruit

Department

IST/Imaging Science and Technology () (TU Delft)

Scanning electron microscopy Current density Brightness Focused ion beam technology Ion sources Electron impact ionisation Electron probes Ionisation chambers

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Published Date

15-11-2011

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Source:

Journal of Vacuum Science & Technology B, 29 (6), 2011

Faculty

Applied Sciences

Department

IST/Imaging Science and Technology

Abstract

A next generation ion source suitable for both high resolution focused ion beam milling and imaging applications is currently being developed. The new ion source relies on a method of which positively charged ions are extracted from a miniaturized gas chamber where neutral gas atoms become ionized by direct electron impact. The use of a very small gas chamber and a very narrow electron beam (

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